Single trace terahertz spectroscopic ellipsometry
نویسندگان
چکیده
منابع مشابه
Spectroscopic ellipsometry study
The dielectric functions of InP, IIla.53 Gao.47 As, and 1110.75 Gao.2S Aso.s P 0.5 epitaxial layers have been measured using a polarization-modulation spectroscopic ellipsometer in the 1.5 to 5.3 eV region. The oxide removal procedure has been carefully checked by comparing spectroscopic ellipsometry and x-ray photoelectron spectroscopy measurements. These reference data have been used to inves...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2019
ISSN: 1094-4087
DOI: 10.1364/oe.27.035468